Electronic desorption of alkyl monolayers from silicon by very highly charged ions

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 6, 1998, Pages 3298-3300

  Schenkel, T ^a   Schneider, M ^a   Hattass, M ^a   Newman, M W ^a   Barnes, A V ^a   Hamza, A V ^a   Schneider, D H ^a   Cicero, R L ^b   Chidsey, C E D ^b  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

^b STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 11744349748     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590372     Document Type: Article

References (22)

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