Convection-based Accelerometer and Tilt Sensor Implemented in Standard CMOS

ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)

Volumn 1998-AE, Issue , 1998, Pages 487-490

  Milanovie, Veljko ^a   Bowen, Edwin ^b   Tea, Nim ^c   Suehle, John ^c   Payne, Beverly ^c   Zaghloul, Mona ^a   Gaitan, Michael ^c  

^a George Washington University   (United States)

^b RF Microsystems Inc ^*  (United States)

^c NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; CMOS INTEGRATED CIRCUITS; HEAT CONVECTION; MEMS; MICROELECTROMECHANICAL DEVICES; THERMISTORS; THERMOCOUPLES;

ACCELEROMETER SENSOR; BRIDGE CONFIGURATION; CONDITION; DIFFERENTIAL CONFIGURATION; LINEARITY ERRORS; MICROHEATER; PROOF MASS; STANDARD CMOS; TEMPERATURE DIFFERENCES; TILT SENSOR;

HEATING EQUIPMENT;

EID: 85125019585     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE1998-1289     Document Type: Conference Paper

References (11)

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