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Volumn 10, Issue 6, 2004, Pages 753-763

Charge neutralization in the ESEM for quantitative X-ray microanalysis

Author keywords

Charge neutralization; Copper gold alloys; Energy dispersive X ray spectrometry; Environmental scanning electron microscopy; NIST SRM 482; Quantitative analysis

Indexed keywords


EID: 11244337974     PISSN: 14319276     EISSN: None     Source Type: Journal    
DOI: 10.1017/S1431927604040693     Document Type: Conference Paper
Times cited : (10)

References (25)
  • 1
    • 0000408287 scopus 로고
    • CITZAF: A package of correction programs for the quantitative electron microbeam X-ray analysis of thick polished materials, thin films, and particles
    • ARMSTRONG, J.T. (1995). CITZAF: A package of correction programs for the quantitative electron microbeam X-ray analysis of thick polished materials, thin films, and particles. Microbeam Anal 4, 177-200.
    • (1995) Microbeam Anal , vol.4 , pp. 177-200
    • Armstrong, J.T.1
  • 3
    • 0001906907 scopus 로고
    • X-ray microanalysis in the ESEM
    • Bailey, G.W. (Ed.), San Francisco: San Francisco Press
    • BOLON, R.B. (1991). X-ray microanalysis in the ESEM. In Microbeam Analysis-1991, Bailey, G.W. (Ed.), pp. 199-200. San Francisco: San Francisco Press.
    • (1991) Microbeam Analysis-1991 , pp. 199-200
    • Bolon, R.B.1
  • 5
    • 0030509549 scopus 로고    scopus 로고
    • Electron probe microanalysis of insulating materials: Quantification problems and some possible solutions
    • CAZAUX, J. (1996). Electron probe microanalysis of insulating materials: Quantification problems and some possible solutions. X-Ray Spectrom 25, 265-280.
    • (1996) X-Ray Spectrom , vol.25 , pp. 265-280
    • Cazaux, J.1
  • 6
    • 33947711876 scopus 로고
    • Foundations of environmental scanning electron microscopy
    • New York: Academic Press, Inc.
    • DANILATOS, G.D. (1988). Foundations of environmental scanning electron microscopy. In Advances in Electronics and Electron Physics, vol. 71, pp. 109-250. New York: Academic Press, Inc.
    • (1988) Advances in Electronics and Electron Physics , vol.71 , pp. 109-250
    • Danilatos, G.D.1
  • 7
    • 0027290520 scopus 로고
    • Introduction to the ESEM instrument
    • DANILATOS, G.D. (1993). Introduction to the ESEM instrument. Microsc Res Technol 25, 354-361.
    • (1993) Microsc Res Technol , vol.25 , pp. 354-361
    • Danilatos, G.D.1
  • 8
    • 0031396343 scopus 로고    scopus 로고
    • A new correction method for high-resolution energy-dispersive X-ray analyses in the environmental scanning electron microscope
    • DOEHNE, E. (1997). A new correction method for high-resolution energy-dispersive X-ray analyses in the environmental scanning electron microscope. Scanning 19, 75-78.
    • (1997) Scanning , vol.19 , pp. 75-78
    • Doehne, E.1
  • 9
    • 0012708531 scopus 로고
    • Empirical evaluation of the electron skirt in the environmental SEM: Implications for energy dispersive X-ray analysis
    • DOEHNE, E. & BOWER, N.W. (1993). Empirical evaluation of the electron skirt in the environmental SEM: Implications for energy dispersive X-ray analysis. Microbeam Anal 2, S35-36.
    • (1993) Microbeam Anal , vol.2
    • Doehne, E.1    Bower, N.W.2
  • 11
    • 11244291450 scopus 로고
    • Desktop Spectrum Analyzer. National Institute of Standards and Technology, Gaithersburg, MD, US Patent 529913
    • FIORI, C.E., SWYT, C.R. & MYKLEBUST, R.L. (1993). Desktop Spectrum Analyzer. National Institute of Standards and Technology, Gaithersburg, MD, US Patent 529913.
    • (1993)
    • Fiori, C.E.1    Swyt, C.R.2    Myklebust, R.L.3
  • 12
    • 0033371081 scopus 로고    scopus 로고
    • Some theoretical considerations on X-ray microanalysis in the environmental or variable pressure scanning electron microscope
    • GAUVIN, R. (1999). Some theoretical considerations on X-ray microanalysis in the environmental or variable pressure scanning electron microscope. Scanning 21, 388-393.
    • (1999) Scanning , vol.21 , pp. 388-393
    • Gauvin, R.1
  • 13
    • 0029098934 scopus 로고
    • X-ray microanalysis of wet biological specimens in the environmental scanning electron microscope. 1. Reduction of specimen distance under different atmospheric conditions
    • GILPIN, C. & SIGEE, D.C. (1995). X-ray microanalysis of wet biological specimens in the environmental scanning electron microscope. 1. Reduction of specimen distance under different atmospheric conditions. J Microsc 179, 22-28.
    • (1995) J Microsc , vol.179 , pp. 22-28
    • Gilpin, C.1    Sigee, D.C.2
  • 15
    • 0002730578 scopus 로고
    • Effects of chamber pressure and accelerating voltage on X-ray resolution in the ESEM
    • Bailey, G.W. (Ed.), San Francisco: San Francisco Press
    • GRIFFIN, B.J. (1992). Effects of chamber pressure and accelerating voltage on X-ray resolution in the ESEM. In Proceedings of the 50th Annual Meeting of the Electron Microscopy Society of America, Bailey, G.W. (Ed.), pp. 1324-1325. San Francisco: San Francisco Press.
    • (1992) Proceedings of the 50th Annual Meeting of the Electron Microscopy Society of America , pp. 1324-1325
    • Griffin, B.J.1
  • 16
    • 0038744519 scopus 로고    scopus 로고
    • Charge-related problems associated with X-ray microanalysis in the variable pressure scanning electron microscope at low pressures
    • GRIFFIN, B.J. & SUVOROVA, A.A. (2003). Charge-related problems associated with X-ray microanalysis in the variable pressure scanning electron microscope at low pressures. Microsc Microanal 9, 155-165.
    • (2003) Microsc Microanal , vol.9 , pp. 155-165
    • Griffin, B.J.1    Suvorova, A.A.2
  • 19
    • 23044522219 scopus 로고    scopus 로고
    • Review of techniques for overcoming XEDS problems in the environmental scanning electron microscope
    • MANSFIELD, J. (1997). Review of techniques for overcoming XEDS problems in the environmental scanning electron microscope. Microsc Microanal 3 (Suppl 2), 1207-1208.
    • (1997) Microsc Microanal , vol.3 , Issue.2 SUPPL. , pp. 1207-1208
    • Mansfield, J.1
  • 20
    • 0001729530 scopus 로고    scopus 로고
    • Electron-gas interactions in the environmental scanning electron microscopes gaseous detector
    • MEREDITH, P., DONALD, B. & THIEL, B. (1996). Electron-gas interactions in the environmental scanning electron microscopes gaseous detector. Scanning 18, 467-473.
    • (1996) Scanning , vol.18 , pp. 467-473
    • Meredith, P.1    Donald, B.2    Thiel, B.3
  • 21
    • 0032170341 scopus 로고    scopus 로고
    • Secondary electron imaging in the variable pressure scanning electron microscope
    • MOHAN, A., KHANNA, N., HWU, J. & JOY, D.C. (1998). Secondary electron imaging in the variable pressure scanning electron microscope. Scanning 20, 436-441.
    • (1998) Scanning , vol.20 , pp. 436-441
    • Mohan, A.1    Khanna, N.2    Hwu, J.3    Joy, D.C.4
  • 22
    • 0002560316 scopus 로고    scopus 로고
    • Imaging deep holes in structures with gaseous secondary electron detection in the environmental scanning electron microscope
    • NEWBURY, D.E. (1996). Imaging deep holes in structures with gaseous secondary electron detection in the environmental scanning electron microscope. Scanning 18, 474-482.
    • (1996) Scanning , vol.18 , pp. 474-482
    • Newbury, D.E.1
  • 23
    • 0032237854 scopus 로고    scopus 로고
    • Standardless quantitative electron excited X-ray microanalysis by energy-dispersive spectrometry: What is its proper role?
    • NEWBURY, D.E. (1999). Standardless quantitative electron excited X-ray microanalysis by energy-dispersive spectrometry: What is its proper role? Micros Microanal 4, 585-597.
    • (1999) Micros Microanal , vol.4 , pp. 585-597
    • Newbury, D.E.1
  • 24
    • 0030797757 scopus 로고    scopus 로고
    • An improved model for gaseous amplification in the environmental SEM
    • THIEL, B.L., BACHE, I.C., FLETCHER, A.L., MEREDITH, P. & DONALD, A.M. (1997). An improved model for gaseous amplification in the environmental SEM. J Microsc 187, 143-157.
    • (1997) J Microsc , vol.187 , pp. 143-157
    • Thiel, B.L.1    Bache, I.C.2    Fletcher, A.L.3    Meredith, P.4    Donald, A.M.5
  • 25
    • 0031084773 scopus 로고    scopus 로고
    • Development of environmental scanning electron microscopy electron beam profile imaging with self-assembled monolayers and secondary ion mass spectroscopy
    • WIGHT, S.A., GILLEN, G. & HERNE, T. (1997). Development of environmental scanning electron microscopy electron beam profile imaging with self-assembled monolayers and secondary ion mass spectroscopy. Scanning 19, 71-74.
    • (1997) Scanning , vol.19 , pp. 71-74
    • Wight, S.A.1    Gillen, G.2    Herne, T.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.