Secondary electron imaging in the variable pressure scanning electron microscope

Scanning

Volumn 20, Issue 6, 1998, Pages 436-441

  Mohan, A ^a   Khanna, N ^a   Hwu, J ^a   Joy, D C ^a,b  

^a UNIVERSITY OF TENNESSEE   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

Detectors; Ions; Secondary electrons; Variable pressure SEM

Indexed keywords

BACKSCATTERING; DETECTORS; ELECTRODES; ELECTRON MICROSCOPES; ELECTRONS; GASES; IONIZATION; IONS; MODIFICATION; PRESSURE; SCANNING ELECTRON MICROSCOPY;

BACKSCATTERED ELECTRON DETECTOR; BIASED ELECTRODE; EVERHART-THORNLEY SECONDARY ELECTRON; GASEOUS SECONDARY ELECTRON DETECTOR; MEAN FREE PATH; SECONDARY ELECTRONS; VARIABLE PRESSURE SCANNING ELECTRON MICROSCOPE;

IMAGING TECHNIQUES;

ARTICLE; ELECTRON MICROSCOPY; IMAGE QUALITY; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPY;

EID: 0032170341     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: 10.1002/sca.1998.4950200603     Document Type: Article

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