Development of environmental scanning electron microscopy electron beam profile imaging with self-assembled monolayers and secondary ion mass spectroscopy

Scanning

Volumn 19, Issue 2, 1997, Pages 71-74

  Wight, S ^a   Gillen, G ^a   Herne, T ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Backscatter; Environmental scanning electron microscope; ESEM; Monte Carlo; SAM; Self assembled monolayer

Indexed keywords

ELECTRON BEAMS; ELECTRON SCATTERING; MOLECULES; MONOLAYERS; SECONDARY ION MASS SPECTROMETRY;

ENVIRONMENTAL SCANNING ELECTRON MICROSCOPY; SELF ASSEMBLED MONOLAYER;

SCANNING ELECTRON MICROSCOPY;

ARTICLE; ELECTRON BEAM; ELECTRON RADIATION; MASS SPECTROMETRY; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPY; SYSTEM ANALYSIS; X RAY MICROANALYSIS;

EID: 0031084773     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: 10.1002/sca.4950190202     Document Type: Article

References (6)