Electromigration lifetime and critical void volume

Applied Physics Letters

Volumn 85, Issue 20, 2004, Pages 4639-4641

  He, Jun ^a   Suo, Z ^b   Marieb, T N ^a   Maiz, J A ^a  

^a INTEL CORPORATION   (United States)

^b HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DISTRIBUTION OF CRITICAL VOLUME (DCV); ELECTRIC CURRENT DENSITY; ORGANOSILICATE GLASSES; STATISTICAL DISTRIBUTIONS;

CURRENT DENSITY; DIELECTRIC MATERIALS; ELECTRIC CURRENTS; GLASS; PERMITTIVITY; SILICATE MINERALS; STATISTICAL METHODS; TESTING;

ELECTROMIGRATION;

EID: 10944241860     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1821631     Document Type: Article

References (14)

1. R. Rosenberg, D. C. Edelstein, C.-K. Hu, and K. P. Rodbell. Annu. Rev. Mater. Sci. 30, 229 (2000).
2. M. A. Hussein and Jun He, IEEE Trans. Semicond. Manuf. (to be published).
3. S. P. Hau-Riege and C. V. Thompson, J. Mater. Res. 15, 1797 (2000).
4. K.-D. Lee, X. Lu, E. T. Ogawa, H. Matsuhashi, and P. S. Ho, Proceedings of the 40th Annual IEEE International Reliability Physics Symposium, Dallas, 2002 (IEEE, New York, 2002), pp. 322-326.
5. Z. Suo, in Comprehensive Structural Integrity, edited by W. Gerberich and W. Yang (Elsevier, Amsterdam, 2003), Vol. 8, pp. 265-324.
6. S. P. Hau-Riege, J. Appl. Phys. 91, 2014 (2002).
7. C. S. Hau-Riege, A. P. Marathe, and V. Pham, Proceedings of the 41st Annual IEEE International Reliability Physics Symposium, Dallas, 2003 (IEEE, New York, 2003), pp. 173-177.
8. C.-K. Hu, L. Gignac, E. Liniger, B. Herbst, D. L. Rath, S. T. Chen, S. Kaldor, A. Simon, and W.-T. Tseng, Appl. Phys. Lett. 83, 869 (2003).
9. I. A. Blech, J. Appl. Phys. 47, 1203 (1976).
10. R. G. Filippi, G. A. Biery, and R. A. Wachnik, J. Appl. Phys. 78, 3756 (1995).
11. Z. Suo, Acta Mater. 46, 3725 (1998).
12. V. K. Andleigh, V. T. Srikar, Y. J. Park, and C. V. Thompson, J. Appl. Phys. 86, 6737 (1999).
13. M. A. Korhonen, P. Boergesen, K. N. Tu, and C.-Y. Li, J. Appl. Phys. 73, 3790 (1993).
14. Z. Suo, W. Wang, and M. Yang, Appl. Phys. Lett. 64, 1944 (1994).