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Journal of Micromechanics and Microengineering

Volumn 14, Issue 12, 2004, Pages 1608-1613

Design, fabrication and characterization of single crystal silicon microactuator for hard disk drives

(5) Mou, J Q a Lu, Y a Yang, J P a Li, Q H a Guo, G X a

a DATA STORAGE INSTITUTE (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; ELECTRIC POTENTIAL; ELECTROSTATICS; FABRICATION; FREQUENCY RESPONSE; HARD DISK STORAGE; SERVOMECHANISMS; SILICON; SINGLE CRYSTALS; THERMODYNAMIC STABILITY;

DUAL STAGE SERVO SYSTEMS; SINGLE CRYSTAL SILICON MICROACTUATORS; TRACKING DIRECTION;

MICROACTUATORS;

EID: 10844244090 PISSN: 09601317 EISSN: None Source Type: Journal
DOI: 10.1088/0960-1317/14/12/002 Document Type: Article

Times cited : (6)

References (8)

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2
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4
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5
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6
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