Thermal stability modeling and evaluation of piggy-back microactuator for hard disk drives

Digest of the Asia-Pacific Magnetic Recording Conference 2002, APMRC 2002

Volumn , Issue , 2002, Pages

  Mou, J Q ^a   Lu, Y ^a   Yang, J P ^a   Lim, B B ^a   Chen, S X ^a  

^a DATA STORAGE INSTITUTE   (Singapore)

Author keywords

Hard disk drives; Microactuator; Stability; Thermal

Indexed keywords

CONVERGENCE OF NUMERICAL METHODS; CRYSTAL MICROSTRUCTURE; DEFORMATION; DRIVES; ELECTROSTATIC ACTUATORS; FINITE ELEMENT METHOD; MAGNETIC RECORDING; MICROACTUATORS; MONOCRYSTALLINE SILICON; SILICON WAFERS; SINGLE CRYSTALS; STABILITY; THERMODYNAMIC STABILITY;

ELECTROSTATIC MICROACTUATORS; HARD DISK DRIVE; OPERATIONAL CHARACTERISTICS; OPERATIONAL PERFORMANCE; SINGLE CRYSTAL SILICON; SINGLE CRYSTAL SILICON MICROACTUATORS; TEMPERATURE STABILITY; THERMAL;

HARD DISK STORAGE;

EID: 84964474656     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/APMRC.2002.1037699     Document Type: Conference Paper

References (3)

1. T. Hirano, L.S. Fan, T. Semba, et al, "Micro Actuator For Tera Storage", Proc., IEEE Micro Electro Mechanical Systems, pp441-446, 1999.
2. W. Menz, and J. Mohr, "The LIGA Technique and Its Potential for Microsystems-A Survey", IEEE Transactions on Industrial Electronics, Vol.42, No.5, pp431-441, 1995.
3. J. Q. Mou, S. X. Chen, Y. Lu, "Single Crystal Silicon MEMS Microactuator for High Density Hard Disk Drive", Proc., SPIE Devices and Process Technologies for MEMS and Microelectronics II, Vol.4592, pp443-449, 2001.