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Volumn , Issue , 2002, Pages
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Electrostatic microactuator for future hard disk drive
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Author keywords
Bandwidth; Dual stage; Electrostatic; MEMS
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Indexed keywords
ACTUATOR DISKS;
BANDWIDTH;
BEARINGS (MACHINE PARTS);
DIGITAL STORAGE;
ELECTROSTATIC ACTUATORS;
ELECTROSTATICS;
MAGNETIC ACTUATORS;
MAGNETIC RECORDING;
MAGNETISM;
MEMS;
MICROACTUATORS;
DUAL STAGE;
ELECTROSTATIC MICROACTUATORS;
HARD DISK DRIVE;
HIGH BANDWIDTH;
MAGNETIC DATA;
MAGNETIC TRACKS;
MECHANICAL RESONANCE;
MEMS TECHNOLOGY;
HARD DISK STORAGE;
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EID: 84964411836
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/APMRC.2002.1037695 Document Type: Conference Paper |
Times cited : (4)
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References (4)
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