Quality based design approach for a single crystal silicon microactuator using DOE technique and response surface model

Microsystem Technologies

Volumn 8, Issue 2-3, 2002, Pages 182-187

  Chen, S ^a   Yang, J ^a   Mou, J ^a   Lu, Y ^a  

^a DATA STORAGE INSTITUTE   (Singapore)

Author keywords

Design of experiment and Response surface model; Finite element Boundary element method; Hard disk drive; MEMS; Microactuator

Indexed keywords

BOUNDARY ELEMENT METHOD; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; OPTIMIZATION; POLYNOMIAL APPROXIMATION; QUALITY CONTROL; REGRESSION ANALYSIS; RELIABILITY; SILICON; SINGLE CRYSTALS;

FITTED RESPONSE SURFACE MODELS; HARD DISK DRIVES (HDD);

HARD DISK STORAGE;

EID: 0036576010     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-001-0128-8     Document Type: Conference Paper

References (17)

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