Vibrational properties of amorphous CN x : H films by fourier transform infrared spectroscopy

Journal of the Korean Physical Society

Volumn 45, Issue 5 II, 2004, Pages 1268-1271

  Ha, S G ^a   Lee, Ji Gong ^a   Lee, Sung Pil ^a  

^a Kyungnam University   (South Korea)

Author keywords

Amorphous carbon nitride film; Bonding structure; FTIR; Sputtering system

Indexed keywords

EID: 10644253462     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

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