Electron-beam-induced current study of electrically active defects in 4H-SiC

Journal of Physics Condensed Matter

Volumn 16, Issue 2, 2004, Pages

  Diaz Guerra C ^a   Piqueras, J ^a  

^a UNIVERSIDAD COMPLUTENSE DE MADRID   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CAMERAS; CATHODOLUMINESCENCE; CHARGE COUPLED DEVICES; CRYSTAL DEFECTS; DIFFUSION; ELECTRIC POTENTIAL; ELECTRON BEAMS; HYDROGEN; IMAGE ANALYSIS; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS;

ELECTRON BEAM INDUCED CURRENT (EBIC); SECONDARY ELECTRONS (SE);

SILICON CARBIDE;

EID: 1042266158     PISSN: 09538984     EISSN: None     Source Type: Journal    
DOI: 10.1088/0953-8984/16/2/026     Document Type: Conference Paper

References (20)

1. Matsunami H and Kimoto T 1997 Mater. Sci. Eng. R 20 125
2. Zimmermann U, Österman J, Kuylenstierna D, Konstantinov A, Vetter W M and Dudley M 2003 J. Appl. Phys. 93 611
3. Wahab Q, Ellison A, Henry A, Janzén E, Hallin C, Di Persio J and Martínez R 2000 Appl. Phys. Lett. 76 2725
4. Bhatnagar M, Baliga B J, Kirk H R and Rozgonyi G A 1996 IEEE Trans. Electron Devices 43 150
5. Kimoto T, Miyamoto N and Matsunami H 1999 IEEE Trans. Electron Devices 46 471
6. Nava F, Vanni P, Lanzieri C and Canali C 1999 Nucl. Instrum. Methods A 437 354
7. Kuiken H K and van Opdorp C 1985 J. Appl. Phys. 57 2077
8. Si W and Dudley M 1997 J. Electron. Mater. 26 151
9. Konstantinov A O, Hallin C, Pecz B, Kordina O and Janzén E 1997 J. Cryst. Growth 178 495
10. Neudeck P G, Huang W and Dudley M 1999 IEEE Trans. Electron Devices 46 478
11. Neudeck P G and Fazi C 1999 IEEE Trans. Electron Devices 46 485
12. Chernyak L, Lyakhovitskaya V, Richter S, Jakubowicz A, Manassen Y, Cohen S R and Cahen D 1996 J. Appl. Phys. 80 2749
13. Kittler M, Seifert W, Stemmer M and Palm J 1995 J. Appl. Phys. 77 3725
14. Chemyak L, Osinsky A, Temkin H, Yang J W, Chen Q and Asif Khan M 1996 Appl. Phys. Lett. 69 2531
15. Österman J, Hallén A, Jargelius M, Zimmermann U, Galeckas A and Breitzholtz B 2000 Mater. Sci. Forum 338-342 777
16. Tabib-Azar M, Hubbard S M, Schnabel C M and Bailey S 1998 J. Appl. Phys. 84 3986
17. Kuznetsov N et al 2000 Mater. Sci. Forum 338-342 229
18. Kittler M and Seifert W 1993 Phys. Status Solidi a 138 687
19. Kittler M, Seifert W and Schröder K W 1986 Phys. Status Solidi a 93 K101
20. Eckstein M and Habermeier H-U 1991 J. Physique Coll. 1 23