Optimal design of a micro parallel positioning platform. Part I: Kinematic analysis

Robotica

Volumn 22, Issue 6, 2004, Pages 599-609

  Oh, Kun Ku ^a   Liu, Xin Jun ^a   Kang, Deuk Soo ^a   Kim, Jongwon ^a  

^a Seoul National University   (South Korea)

Author keywords

Dual stage system; Kinematics; Micro positioning platform; Parallel mechanism

Indexed keywords

ACTUATORS; CLEAN ROOMS; DEGREES OF FREEDOM (MECHANICS); ENERGY UTILIZATION; MICROELECTRODES; MOTION CONTROL; PARAMETER ESTIMATION; PROBLEM SOLVING;

DUAL STAGE SYSTEM; MICRO POSITIONING PLATFORM; MOTION DYNAMICS; PARALLEL MECHANISM;

KINEMATICS;

EID: 10244246718     PISSN: 02635747     EISSN: None     Source Type: Journal    
DOI: 10.1017/S0263574704000396     Document Type: Article

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