Thin-foil reflection gratings for Constellation-X

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5488, Issue PART 1, 2004, Pages 283-290

  Heilmann, Ralf K ^a   Akilian, Mireille ^a   Chang, Chih Hao ^a   Forest, Craig R ^a   Joo, Chulmin ^a   Lapsa, Andrew ^a   Montoya, Juan C ^a   Schattenburg, Mark L ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Blaze; Constellation X; Figure metrology; Nanoimprint lithography; Reflection gratings; Replication; Sawtooth; Shack Hartmann; Thin foil optics; X ray optics

Indexed keywords

ASTRONOMY; DIFFRACTION GRATINGS; FRICTION; LITHOGRAPHY; SPECTROMETERS; STIFFNESS;

BLAZE; CONSTELLATION-X; FIGURE METROLOGY; NANOIMPRINT LITHOGRAPHY; REFLECTION GRATINGS; REPLICATION; SAWTOOTH; SHACK-HARTMANN; THIN-FOIL OPTICS; X-RAY OPTICS;

LIGHT REFLECTION;

EID: 10044293223     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.552001     Document Type: Conference Paper

References (14)

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