Metrology of thin transparent optics using Shack-Hartmann wavefront sensing

Optical Engineering

Volumn 43, Issue 3, 2004, Pages 742-753

  Forest, Craig R ^a   Canizares, Claude R ^a   Neal, Daniel R ^b   McGuirk, Michael ^a   Schattenburg, Mark L ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b WaveFront Sciences Incorporated   (United States)

Author keywords

Optical metrology; Shack Hartmann; Thin glass optics; Wavefront sensing

Indexed keywords

MEASUREMENTS; OPTICAL GLASS; REMOTE SENSING; SURFACE TOPOGRAPHY; THIN FILMS; ULTRAVIOLET SPECTROSCOPY; WAVEFRONTS;

OPTICAL METROLOGY; SHACK-HARTMANN WAVEFRONT SENSING; SURFACE MAPS; THIN TRANSPARENT OPTICS;

ATMOSPHERIC OPTICS;

EID: 2342539759     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1645256     Document Type: Article

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