Electrical and piezoresistive properties of TaN-Cu nanocomposite thin films

Thin Solid Films

Volumn 469-470, Issue SPEC. ISS., 2004, Pages 455-459

  Wang, C M ^a   Hsieh, J H ^a   Li, C ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Nanocomposite; Resistivity; Strain gauge factor ( ); Temperature coefficient of resistivity (TCR)

Indexed keywords

ELECTRIC RESISTANCE; NANOSTRUCTURED MATERIALS; PARTICLE SIZE ANALYSIS; PIEZOELECTRICITY; TANTALUM COMPOUNDS; THERMAL EFFECTS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

PIEZORESISTANCE; STRAIN GAUGE FACTOR; TANTALUM NITRIDE; TEMPERATURE COEFFICIENT OF RESISTIVITY (TCR);

THIN FILMS;

EID: 10044274165     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.06.170     Document Type: Article

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