Assessment of different X-ray stress measuring techniques for thin titanium nitride coatings

Journal of Applied Crystallography

Volumn 33, Issue 2, 2000, Pages 312-322

  Saerens, A ^a   Van Houtte, P ^a   Meert, B ^b   Quaeyhaegens, C ^b,c  

^a UNIVERSITY OF LEUVEN   (Belgium)

^b HASSELT UNIVERSITY   (Belgium)

^c Union Minière ^*  (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

TITANIUM DERIVATIVE; TITANIUM NITRIDE; UNCLASSIFIED DRUG;

ARTICLE; CRYSTAL STRUCTURE; CRYSTALLOGRAPHY; INTERMETHOD COMPARISON; MATHEMATICAL COMPUTING; STRESS; X RAY DIFFRACTION;

EID: 0034484520     PISSN: 00218898     EISSN: None     Source Type: Journal    
DOI: 10.1107/S0021889800000145     Document Type: Article

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