Interferometry system for out-of-plane microdisplacement measurement: Application to mechanical expertise of scratch drive actuators

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5145, Issue , 2003, Pages 45-52

  Józwik, Michał ^a,b   Gorecki, Christophe ^a   Le Moal, Patrice ^a   Joseph, Eric ^a   Minotti, Patrice ^a  

^a UNIVERSITÉ DE FRANCHE COMTÉ   (France)

^b WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Contact interactions; Electrostatic actuators; Interferometry; Loading characteristics; Out of plane displacements measurements

Indexed keywords

COMPUTER SIMULATION; FINITE ELEMENT METHOD; INTERFEROMETERS; INTERFEROMETRY; METALLOGRAPHIC MICROSTRUCTURE; PHASE SHIFT; POLYSILICON;

CONTACT INTERACTIONS; MICRODISPLACEMENT MEASUREMENT; SCRATCH DRIVE ACTUATORS; TEMPORAL PHASE SHIFT; TWYMAN-GREEN INTERFEROMETER;

ELECTROSTATIC ACTUATORS;

EID: 1342267200     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.502247     Document Type: Conference Paper

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