Real time measurement of microscopic surface shape using high speed cameras with continuously scanning interference microscopy

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5458, Issue , 2004, Pages 101-108

  Montgomery, Paul ^a   Draman, Cemal ^a   Uhring, Wilfried ^a   Tomasini, François ^b  

^a CNRS   (France)

^b Fast Vision Technologies   (France)

Author keywords

4D characterization; Interference microscopy; MOEMS Microsystems; Real time measurement; White light interferometry

Indexed keywords

CAMERAS; CHARACTERIZATION; CHARGE COUPLED DEVICES; FIELD PROGRAMMABLE GATE ARRAYS; HIGH SPEED CAMERAS; IMAGE ANALYSIS; LIGHT INTERFERENCE; MEASUREMENTS; REAL TIME SYSTEMS; SCANNING; SURFACE STRUCTURE;

4D CHARACTERIZATION; INTERFERENCE MICROSCOPY; MOEMS MICROSYSTEMS; REAL TIME MEASUREMENTS; WHITE LIGHT INTERFEROMETRY (WLI);

MICROSCOPIC EXAMINATION;

EID: 10044235131     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.545724     Document Type: Conference Paper

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