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Volumn 20, Issue 3, 2002, Pages 169-175
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Real-time high-resolution topographic imagery using interference microscopy
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Author keywords
[No Author keywords available]
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Indexed keywords
CAMERAS;
CHARGE COUPLED DEVICES;
INTERFEROMETRY;
MORPHOLOGY;
OPTICAL RESOLVING POWER;
PHASE SHIFT;
SCANNING ELECTRON MICROSCOPY;
SURFACES;
PHASE-SHIFTING INTERFEROMETRY;
IMAGING TECHNIQUES;
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EID: 0036897709
PISSN: 12860042
EISSN: None
Source Type: Journal
DOI: 10.1051/epjap:2002088 Document Type: Article |
Times cited : (9)
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References (47)
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