A new method and a novel facility for ultra-precise 2D topography measurement of large optical surfaces

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5457, Issue , 2004, Pages 401-410

  Wurm, Matthias ^a   Geckeler, Ralf D ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Autocollimator; Deflectometry; Flatness; Interferometry; Topography measurement

Indexed keywords

ANGLE MEASUREMENT; CURVE FITTING; DATA ACQUISITION; INTERFEROMETRY; OPTICAL COLLIMATORS; SCANNING; SURFACES;

AUTOCOLLIMATOR; DEFLECTOMETRY; FLATNESS; TOPOGRAPHY MEASUREMENT;

OPTICAL VARIABLES MEASUREMENT;

EID: 10044219583     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.545646     Document Type: Conference Paper

References (13)

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