Fabrication of nanocontacts for molecular devices using nanoimprint lithography

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 20, Issue 2, 2002, Pages 665-667

  Austin, Michael ^a   Chou, Stephen Y ^a  

^a Princeton University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; ELECTRIC CURRENTS; ELECTRODES; ELECTROMIGRATION; ELECTRON BEAMS; GOLD; NANOSTRUCTURED MATERIALS; PROBABILITY; REACTIVE ION ETCHING; SELF ASSEMBLY; SILICA;

NANOIMPRINT LITHOGRAPHY (NIL);

NANOTECHNOLOGY;

EID: 0036504536     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1463068     Document Type: Article

References (10)