Structural, electrical, and optical properties of diamondlike carbon films deposited by dc magnetron sputtering

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 21, Issue 6, 2003, Pages

  Broitman, E ^a   Lindquist, O P A ^b   Hellgren, N ^c   Hultman, L ^b   Holloway, B C ^a  

^a Dept of Economics and Thomas Jefferson Program in Public Policy at the College of William and Mary   (United States)

^b LINKÖPING UNIVERSITY   (Sweden)

^c University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; CRYSTAL MICROSTRUCTURE; ELECTRIC PROPERTIES; ION BOMBARDMENT; LIGHT ABSORPTION; MAGNETRON SPUTTERING; NUMERICAL ANALYSIS; OPTICAL PROPERTIES; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SPUTTER DEPOSITION; SURFACE ROUGHNESS;

ION ENERGY; NEAR EDGE X RAY ABSORPTION FINE STRUCTURE; PHOTON ENERGY; SURFACE AREA;

DIAMOND LIKE CARBON FILMS;

EID: 0842268534     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1617277     Document Type: Letter

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