A rod-shaped vibro touch sensor using PZT thin film

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 46, Issue 4, 1999, Pages 875-882

  Kanda, Takefumi ^a   Morita, Takeshi ^a   Kurosawa, Minoru Kuribayashi ^a   Higuchi, Toshiro ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

NATURAL FREQUENCIES; OSCILLATIONS; PIEZOELECTRIC MATERIALS; PROBES; ROUGHNESS MEASUREMENT; SENSITIVITY ANALYSIS; SOLUTIONS; THIN FILMS; VIBRATIONS (MECHANICAL);

HIGH PRESSURE AQUEOUS SOLUTIONS; HYDROTHERMAL METHOD; LONGITUDINAL VIBRATION; PIEZOELECTRIC THIN FILMS; ROD SHAPED VIBRO TOUCH SENSOR; SCANNING PROBE MICROSCOPES;

CONTACT SENSORS;

EID: 0032645817     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.775653     Document Type: Article

References (10)

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