Preparation of (100)- and (111)-textured Pb(Zr,Ti)O3 piezoelectric films and direct measurement of their piezoelectric constants

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 42, Issue 12 A, 2003, Pages

  Gong, Wen ^a   Li, Jing Feng ^a   Chu, Xiangcheng ^a   Gui, Zhilun ^a   Li, Longtu ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Piezoelectric constant; PZT; Sol gel; Texture; Thin films

Indexed keywords

DEPOSITION; LEAD COMPOUNDS; PERMITTIVITY; PIEZOELECTRIC MATERIALS; SOL-GELS; STRAIN; STRAIN GAGES; TEXTURES; THIN FILMS;

PIEZOELECTRIC CONSTANT; PIEZOELECTRIC CONSTANT MEASUREMENT; PIEZOELECTRIC FILMS;

FILM PREPARATION;

EID: 0742268934     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.l1459     Document Type: Letter

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