18O study of the oxidation of reactively sputtered Ti1-xAlxN barrier

Journal of Materials Research

Volumn 16, Issue 9, 2001, Pages 2591-2599

  Hugon, M C ^a   Varniere, F ^b   Letendu, F ^a   Agius, B ^a   Vickridge, I ^c   Kingon, A I ^d  

^a UNIVERSITÉ PARIS SUD   (France)

^b UNIV PARIS SUD   (France)

^c SORBONNE UNIVERSITÉ   (France)

^d North Carolina State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0442307912     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.2001.0356     Document Type: Article

References (24)

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