SCOPUS 정보 검색 플랫폼

Volumn 377-379, Issue , 1997, Pages 197-200

Depth profiling of surface oxidized TiAlN film by synchrotron radiation excited X-ray photoelectron spectroscopy

(10) Esaka, F a Furuya, K a Shimada, H b Imamura, M b Matsubayashi, N b Sato, T b Nishijima, A b Kikuchi, T c Kawana, A d Ichimura, H d

a TOKYO UNIVERSITY OF SCIENCE (Japan)

b NATL INST OF MAT AND CHEM RES (Japan)

c TOKYO UNIVERSITY OF SCIENCE (Japan)

d SUMITOMO METAL MINING CO LTD (Japan)

Author keywords

Nitrides; Oxidation; Synchrotron radiation photoelectron spectroscopy

Indexed keywords

ALUMINA; DIFFUSION IN SOLIDS; INTERFACES (MATERIALS); METALLIC FILMS; NITRIDES; NITROGEN; OXIDATION; PROTECTIVE COATINGS; SURFACE PHENOMENA; SYNCHROTRON RADIATION; TITANIUM DIOXIDE; X RAY PHOTOELECTRON SPECTROSCOPY;

SYNCHROTRON RADIATION PHOTOELECTRON SPECTROSCOPY; TITANIUM ALUMINUM NITRIDE;

TITANIUM ALLOYS;

EID: 0031117753 PISSN: 00396028 EISSN: None Source Type: Journal
DOI: 10.1016/S0039-6028(96)01350-7 Document Type: Article

Times cited : (35)

References (10)

1
- 0030219583
- F. Esaka, H. Shimada, M. Imamura, N. Matsubayashi, T. Sato, A. Nishijima, A. Kawana, H. Ichimura, T. Kikuchi and K. Furuya, Thin Solid Films, 281/282 (1996) 314.
- (1996) Thin Solid Films , vol.281-282 , pp. 314
- Esaka, F.¹ Shimada, H.² Imamura, M.³ Matsubayashi, N.⁴ Sato, T.⁵ Nishijima, A.⁶ Kawana, A.⁷ Ichimura, H.⁸ Kikuchi, T.⁹ Furuya, K.¹⁰

2
- 30244475335
- submitted
- F. Esaka, H. Shimada, M. Imamura, N. Matsubayashi, T. Sato, A. Nishijima, A. Kawana, H. Ichimura, T. Kikuchi and K. Furuya, J. Vac. Sci. Technol. A, submitted.
- J. Vac. Sci. Technol. A
- Esaka, F.¹ Shimada, H.² Imamura, M.³ Matsubayashi, N.⁴ Sato, T.⁵ Nishijima, A.⁶ Kawana, A.⁷ Ichimura, H.⁸ Kikuchi, T.⁹ Furuya, K.¹⁰

3
- 25544459890
- W.-D. Münz, J. Vac. Sci. Technol. A 4 (1986) 2717.
- (1986) J. Vac. Sci. Technol. A , vol.4 , pp. 2717
- Münz, W.-D.¹

4
- 0030564398
- H. Shimada, N. Matsubayashi, M. Imamura, T. Sato and A. Nishijima, Appl. Surf. Sci., 100/101 (1996) 56.
- (1996) Appl. Surf. Sci. , vol.100-101 , pp. 56
- Shimada, H.¹ Matsubayashi, N.² Imamura, M.³ Sato, T.⁴ Nishijima, A.⁵

5
- 0027589851
- H. Ichimura and A. Kawana, J. Mater. Res. 8 (1993) 1093.
- (1993) J. Mater. Res. , vol.8 , pp. 1093
- Ichimura, H.¹ Kawana, A.²

6
- 36449008739
- N. Matsubayashi, H. Shimada, K. Tanaka, T. Sato, Y. Yoshimura and A. Nishijima, Rev. Sci. Instrum. 63 (1992) 1363.
- (1992) Rev. Sci. Instrum. , vol.63 , pp. 1363
- Matsubayashi, N.¹ Shimada, H.² Tanaka, K.³ Sato, T.⁴ Yoshimura, Y.⁵ Nishijima, A.⁶

7
- 0026371472
- S. Tanuma, C.J. Powell and D.R. Penn, Surf. Interface Anal. 17 (1991) 911.
- (1991) Surf. Interface Anal. , vol.17 , pp. 911
- Tanuma, S.¹ Powell, C.J.² Penn, D.R.³

8
- 4444231909
- A. Jablonski and T. Tougaard, J. Vac. Sci. Technol. 8 (1990) 115.
- (1990) J. Vac. Sci. Technol. , vol.8 , pp. 115
- Jablonski, A.¹ Tougaard, T.²

9
- 13944274472
- D. McIntyre, J.E. Greene, G. Hakansson, J.-E. Sundgren and W.-D. Münz, J. Appl. Phys. 67 (1990) 1542.
- (1990) J. Appl. Phys. , vol.67 , pp. 1542
- McIntyre, D.¹ Greene, J.E.² Hakansson, G.³ Sundgren, J.-E.⁴ Münz, W.-D.⁵

10
- 0024036421
- S. Hofmann and H.A. Jehn, Surf. Interface Anal. 12 (1988) 329.
- (1988) Surf. Interface Anal. , vol.12 , pp. 329
- Hofmann, S.¹ Jehn, H.A.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.