Wet-chemical nanoscale patterning of GaAs surfaces using atomic force microscope lithography

Superlattices and Microstructures

Volumn 25, Issue 1-2, 1999, Pages 473-476

  Klehn, Bernd ^a   Skaberna, Sven ^a   Kunze, Ulrich ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

Atomic force microscope; Nanolithography; Wet etching

Indexed keywords

EID: 0348226616     PISSN: 07496036     EISSN: None     Source Type: Journal    
DOI: 10.1006/spmi.1998.0677     Document Type: Article

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