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Volumn 23, Issue 2, 1998, Pages 441-444

SiO2 and Si nanoscale patterning with an atomic force microscope

Author keywords

Atomic force microscope; Nanolithographic

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPUTER SOFTWARE; ETCHING; HEAT TRANSFER; PHOTORESISTS; POTASSIUM COMPOUNDS; SEMICONDUCTOR SWITCHES; SILICA; SILICON WAFERS; SUBSTRATES;

EID: 0031701484     PISSN: 07496036     EISSN: None     Source Type: Journal    
DOI: 10.1006/spmi.1996.0358     Document Type: Article
Times cited : (15)

References (7)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.