Atomic force microscope lithography on carbonaceous films deposited by electron-beam irradiation

Applied Physics Letters

Volumn 72, Issue 6, 1998, Pages 716-718

  Avramescu, Adrian ^a   Ueta, Akio ^a   Uesugi, Katsuhiro ^a   Suemune, Ikuo ^a  

^a HOKKAIDO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000725198     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.120855     Document Type: Article

References (11)

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11. N. Miura, H. Ishii, J. Shirakashi, A. Yamada, and M. Konagai, Appl. Surf. Sci. 113/114, 269 (1997).