The future of perfluorocarbon capture and recycling: Membrane technology

Semiconductor International

Volumn 20, Issue 8, 1997, Pages 265-272

  Cummins, William R ^a   Dupuis, Gerard ^b   Kesari, Susrut ^b   Miner, David ^b   Trilli, Kevin ^b   Fleming, Greg ^c  

^a TEXAS INSTRUMENTS   (United States)

^b AIR LIQUIDE   (France)

^c MEDAL LP   (United States)

Author keywords

Diffusion; Gas permeability; Membrane filters

Indexed keywords

ELECTRONICS INDUSTRY; EXHAUST GASES; FLUOROCARBONS; GAS PERMEABLE MEMBRANES; PURIFICATION; RECYCLING;

GAS PERMEATION; PERFLUOROCOMPOUND GASES; POLYMERIC MEMBRANE FILTERS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0031190458     PISSN: 01633767     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (5)

1. E.A. Dutrow, "Partnership with the Semiconductor Industry for Reduction of PFC Emissions," Proceedings, Semicon Southwest, 1996.
2. D. Rufin, "Preliminary Test Results of Air Liquide's PFC Recovery System," The Semiconductor PFC Workshop: A Partnership for PFC Emissions Reductions, co-sponsored by SEMATECH, SSA and SIA, Feb. 1996.
3. W. Cummins, D. Rufin, "PFC Capture Alpha Systems Testings Update," Semicon West 1996 PFC Technical Update, sponsored by SEMI, July 1996.
4. W. Cummins, D. Rufin, "PFC Capture Alpha System Update," A Partnership for PFC Emissions Reduction, co-sponsored by SEMI, SEMATECH, SSA and SIA, Semicon Southwest, Oct. 1996.
5. W. Cummins, et al., "Evaluation of Air Liquide's Perfluorocompound (PFC) Capture Technology," (ESHC002), SEMATE-CH Doc. ID# 970132291-TR, Feb. 1997.