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Volumn 44, Issue 7, 2001, Pages 189-200

Catalytic technology for PFC emissions control

Author keywords

[No Author keywords available]

Indexed keywords

AIR POLLUTION CONTROL; CATALYST ACTIVITY; CATALYST POISONING; CHEMICAL VAPOR DEPOSITION; COST EFFECTIVENESS; FLUORINE COMPOUNDS; REACTION KINETICS; SEMICONDUCTOR DEVICE MANUFACTURE; VOLATILE ORGANIC COMPOUNDS;

EID: 0035395988     PISSN: 0038111X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article
Times cited : (8)

References (14)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.