|
Volumn 44, Issue 7, 2001, Pages 189-200
|
Catalytic technology for PFC emissions control
a a a |
Author keywords
[No Author keywords available]
|
Indexed keywords
AIR POLLUTION CONTROL;
CATALYST ACTIVITY;
CATALYST POISONING;
CHEMICAL VAPOR DEPOSITION;
COST EFFECTIVENESS;
FLUORINE COMPOUNDS;
REACTION KINETICS;
SEMICONDUCTOR DEVICE MANUFACTURE;
VOLATILE ORGANIC COMPOUNDS;
PERFLUOROCOMPOUNDS (PFC);
THERMAL OXIDIZERS;
INDUSTRIAL EMISSIONS;
|
EID: 0035395988
PISSN: 0038111X
EISSN: None
Source Type: Trade Journal
DOI: None Document Type: Article |
Times cited : (8)
|
References (14)
|