Substrate temperature control from RHEED intensity measurements

Vacuum

Volumn 72, Issue 4, 2004, Pages 363-367

  Mazurek, Piotr ^a   Daniluk, Andrzej ^a   Paprocki, Krzysztof ^a  

^a MARIA CURIE SK ODOWSKA UNIVERSITY   (Poland)

Author keywords

Reflection high energy electron diffraction; Rocking curve; Silicon; Substrate temperature

Indexed keywords

ELECTRIC CONDUCTIVITY; ELECTRON SCATTERING; ENERGY DISSIPATION; EPITAXIAL GROWTH; NUCLEATION; PYROMETERS; REFLECTION HIGH ENERGY ELECTRON DIFFRACTION; SILICON; SUBSTRATES; THIN FILMS;

CRYSTAL TEMPERATURE; LIGHT BAND TRANSMISSION;

TEMPERATURE MEASUREMENT;

EID: 0348011357     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2003.09.005     Document Type: Article

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