Study on Deformations and Stress Distributions in Air-Bridged Lateral-Epitaxial-Grown GaN Films

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 42, Issue 10 B, 2003, Pages

  Ishibashi, Akihiko ^a   Sugahara, Gaku ^a   Kawaguchi, Yasutoshi ^a   Yokogawa, Toshiya ^a  

^a PANASONIC CORPORATION   (Japan)

Author keywords

Air bridge; Finite element method; GaN; Micro Raman; Thermal stress

Indexed keywords

ATOMIC FORCE MICROSCOPY; DEFORMATION; EPITAXIAL GROWTH; FINITE ELEMENT METHOD; GALLIUM NITRIDE; RAMAN SPECTROSCOPY; THERMAL EXPANSION; THERMAL STRESS;

EPITAXIAL LATERAL-OVERGROWTH (ELO); SELECTIVE AREA GROWTH (SAG);

THIN FILMS;

EID: 0347589718     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.l1248     Document Type: Article

References (17)

1. T. Nishinaga, T. Nakano and S. Zhand: Jpn. J. Appl. Phys. 27 (1988) L964.
2. A. Usui, H. Sunakawa, A. Sakai and A. A. Yamaguchi: Jpn. J. Appl. Phys. 36 (1997) L899.
3. T. S. Zheleva, O. H. Nam, M. D. Bremser and R. F. Davis: Appl. Phys. Lett. 71 (1997) 2472.
4. S. Nakamura, M. Senoh, S. Nagahama, N. Iwasa, T. Matsushita and T. Mukai: MRS Internet J. Nitride Semicond. Res. 4S1 (1999) G1.1.
5. Y. Honda, Y. Iyechika, T. Maeda, H. Miyake and K. Hiramatsu: Jpn. J. Appl. Phys. 40 (2001) L309.
6. S. Tomiya, K. Funato, T. Asatsuma, T. Hino, S. Kijima, S. Asano and M. Ikeda: Appl. Phys. Lett. 77 (2000) 636.
7. A. Sakai, H. Sunakawa and A. Usui: Appl. Phys. Lett. 73 (1998) 481.
8. I. Kidoguchi, A. Ishibashi, G. Sugahara and Y. Ban: Appl. Phys. Lett. 76 (2000) 3768.
9. A. Ishibashi, I. Kidoguchi, G. Sugahara and Y. Ban: J. Cryst. Growth 221 (2000) 338.
10. Q. Liu, A. Hoffmann, A. Kaschner, C. Thomsen, J. Christen, P. Veit and R. Clos: Jpn. J. Appl. Phys. 39 (2000) L958.
11. S. Einfeldt, A. M. Roskowski, E. A. Preble and R. F. Davis: Appl. Phys. Lett. 80 (2002) 953.
12. SAMCEF 8.1 User's Manuals (Samtech, Belgium and Surigiken Co. Ltd., Tokyo, 2000)
13. T. Detchprohm, K. Hiramatsu, K. Itoh and I. Akasaki: Jpn. J. Appl. Phys. 31 (1992) L1454.
14. V. A. Savastenko and A. U. Sheleg: Phys. Status Solidi A 48 (1978) K135.
15. H. P. Maruska and J. J. Tietjen: Appl. Phys. Lett. 15 (1969) 327.
16. T. Kozawa, T. Kachi, H. Kano, H. Nagase, N. Koide and K. Manabe: J. Appl. Phys. 77 (1995) 4389.
17. H. Siegle, P. Thurian, L. Eckey, A. Hoffmann, C. Thomsen, B. K. Meyer, H. Amano, I. Akasaki, T. Detchprohm and K. Hiramatsu: Appl. Phys. Lett. 68 (1996) 1265.