Porous Silicon Micromachining Technology Using on SDB-SOI Structure

Journal of the Korean Physical Society

Volumn 43, Issue 6, 2003, Pages

  Park, J Y ^a   Lee, D S ^b   Lee, J H ^b   Bae, Y H ^c  

^a Daejeon Hightech Indust Prom F   (South Korea)

^b Kyungpook National University   (South Korea)

^c Uiduk University   (South Korea)

Author keywords

Flow sensor; Porous silicon rnicromachining; Silicon Direct Bonding (SDB)

Indexed keywords

EID: 0347021198     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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