Characteristics of piezoresistive mass flow sensor fabricated by porous silicon micromachining

Digest of Papers - 2000 International Microprocesses and Nanotechnology Conference, MNC 2000

Volumn , Issue , 2000, Pages 80-81

  Kim, Dong Kwon ^a   Kang, Sung Gyu ^b   Park, Jeong Yong ^a   Sim, Jun Hwan ^c   Shin, Jang Kyoo ^a   Choi, Pyung ^a   Lee, Jong Hyun ^a  

^a Kyungpook National University   (South Korea)

^b Samsung Advanced Institute of Technology (SAIT)   (South Korea)

^c Korea Maritime University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; NANOTECHNOLOGY; SILICON WAFERS;

FLOW-SENSORS; MASS FLOW SENSORS; MICRO-CANTILEVERS; PIEZO-RESISTIVE; POROUS SILICON MICROMACHINING; THREE-LAYER;

POROUS SILICON;

EID: 18844386390     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IMNC.2000.872632     Document Type: Conference Paper

References (0)