Fabrication of microcantilever with a silicon tip prepared by anodization

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 37, Issue 12 B, 1998, Pages 7078-7080

  Higa, Katsuya ^a   Asano, Tanemasa ^a  

^a KYUSHU INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

AFM; Anodization; Microcantilever; Porous Si; Scanning probe

Indexed keywords

EID: 0347806136     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.7078     Document Type: Article

References (5)

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5. K. Higa, K. Nishii and T. Asano: J. Vac. Sci. Technol. B 16 (1998) 651.