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Journal of Applied Physics

Volumn 84, Issue 1, 1998, Pages 526-532

In situ infrared and visible-light ellipsometric investigations of boron nitride thin films at elevated temperatures

(9) Franke, E a Schubert, M a Hecht, J D a Neumann, H a Tiwald, T E b Thompson, D W b Yao, H b Woollam, J A b Hahn, J c

a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM (Germany)

b UNIVERSITY OF NEBRASKA LINCOLN (United States)

c CHEMNITZ UNIVERSITY OF TECHNOLOGY (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0347007698 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.368083 Document Type: Article

Times cited : (18)

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