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Diamond and Related Materials

Volumn 5, Issue 3-5, 1996, Pages 539-543

Spectroscopic ellipsometric study of boron nitride thin films

(7) Pascual, E a Andujar J L a Gimeno, S a Lousa, A a Bosch, A a El Kasmi, M a Bertran, E a

a UNIVERSITY OF BARCELONA (Spain)

Author keywords

Boron nitride; Ellipsometry; R.f. magnetron sputtering; R.f. plasma CVD

Indexed keywords

EID: 0040242371 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/0925-9635(96)80075-6 Document Type: Article

Times cited : (10)

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