Czochralski's Creative Mistake: A Milestone on the Way to the Gigabit Era

Angewandte Chemie - International Edition

Volumn 42, Issue 46, 2003, Pages 5684-5698

  Evers, Jürgen ^a   Klüfers, Peter ^a   Staudigl, Rudolf ^b   Stallhofer, Peter ^b  

^a UNIVERSITY OF MUNICH   (Germany)

^b WACKER CHEMIE AG   (Germany)

Author keywords

Crystal growth; Czochralski, Jan; Defect engineering; Microelectronics; Silicon

Indexed keywords

CRYSTAL DEFECTS; CRYSTAL STRUCTURE; MAGNETIC FIELDS; MICROPROCESSOR CHIPS; MOBILE TELECOMMUNICATION SYSTEMS; RESEARCH AND DEVELOPMENT MANAGEMENT; SILICON; SINGLE CRYSTALS;

CRYSTAL DRAWING TECHNOLOGY;

MICROELECTRONICS;

SILICON;

CRYSTAL STRUCTURE; CRYSTALLIZATION; ELECTRONICS; ENGINEERING; EXPERIMENT; MAGNETIC FIELD; REVIEW; TECHNOLOGY; TEMPERATURE DEPENDENCE;

EID: 0346874404     PISSN: 14337851     EISSN: None     Source Type: Journal    
DOI: 10.1002/anie.200300587     Document Type: Review

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