Challenges for economical growth of high quality 300 mm CZ Si crystals

Microelectronic Engineering

Volumn 45, Issue 2, 1999, Pages 113-125

  Tomzig, Erich ^a   Von Ammon, Wilfried ^a   Dornberger, Erich ^a   Lambert, Ulrich ^a   Zulehner, Werner ^a  

^a SILTRONIC AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; CRYSTAL GROWTH FROM MELT; INTEGRATED CIRCUIT MANUFACTURE; MAGNETIC FIELDS; OPTIMIZATION;

MAGNETIC SYSTEM; SEMICONDUCTOR INDUSTRY;

SILICON WAFERS;

EID: 0032590882     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(99)00109-4     Document Type: Article

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