Encapsulating bis(β-ketoiminato) polyethers. Volatile, fluorine-free barium precursors for metal - Organic chemical vapor deposition

Inorganic Chemistry

Volumn 39, Issue 15, 2000, Pages 3148-3157

  Studebaker, Daniel B ^a   Neumayer, Deborah A ^a   Hinds, Bruce J ^a   Stern, Charlotte L ^a   Marks, Tobin J ^a  

^a NORTHWESTERN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALKALINE EARTH METAL; BARIUM DERIVATIVE; CATION; FLUORINE DERIVATIVE; LIGAND; METAL; METHYL GROUP; ORGANIC COMPOUND; POLYETHER DERIVATIVE; VOLATILE AGENT;

ARTICLE; CHEMICAL ANALYSIS; COMPLEX FORMATION; CRYSTAL STRUCTURE; DRY DEPOSITION; ENCAPSULATION; GEOMETRY; MASS SPECTROMETRY; NUCLEAR MAGNETIC RESONANCE; SYNTHESIS; VAPOR; VOLATILIZATION; X RAY DIFFRACTION;

EID: 0034709865     PISSN: 00201669     EISSN: None     Source Type: Journal    
DOI: 10.1021/ic991161a     Document Type: Article

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