Decomposition behaviors of bis(N-alkoxy-p-ketoiminate) titanium complexes in the depositions of titanium oxide and barium strontium titanate films

Thin Solid Films

Volumn 409, Issue 1, 2002, Pages 82-87

  Hong, Sung Ho ^a   Rim, Sun Kwon ^a   Lee, Ik Mo ^a   Min, Yo Sep ^b   Kim, Daesig ^b   Lee, Wan In ^a  

^a Inha University   (South Korea)

^b Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

Barium strontium titanate (BaxSr1 xTiO3, BST); Liquid source metal organic chemical vapor deposition (LS MOCVD); Ti precursor; Titanium oxide (TiO2)

Indexed keywords

BARIUM TITANATE; DEPOSITION; EVAPORATION; MASS SPECTROMETRY; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MORPHOLOGY; NUCLEAR MAGNETIC RESONANCE SPECTROSCOPY; PYROLYSIS; SPECTRUM ANALYSIS; SYNTHESIS (CHEMICAL); THERMOGRAVIMETRIC ANALYSIS;

TITANIUM COMPLEXES;

THIN FILMS;

EID: 0037156024     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)00108-6     Document Type: Conference Paper

References (14)