Liquid source-MOCVD of BaxSr1-xTiO3 (BST) thin films with a N-alkoxy-β-ketoiminato titanium complex

Chemical Vapor Deposition

Volumn 7, Issue 4, 2001, Pages 146-149

  Min, Yo Sep ^a   Cho, Young Jin ^a   Kim, Daesig ^a   Lee, Jung Hyun ^a   Kim, Byong Man ^a   Lim, Sun Kwon ^b   Lee, Ik Mo ^b   Lee, Wan In ^b  

^a Samsung Advanced Institute of Technology (SAIT)   (South Korea)

^b Inha University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001083156     PISSN: 09481907     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-3862(200107)7:4<146::AID-CVDE146>3.0.CO;2-X     Document Type: Article

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