MOCVD of very thin films of lead lanthanum titanate

Materials Research Society Symposium - Proceedings

Volumn 415, Issue , 1996, Pages 225-230

  Beach, David B ^a   Vallet, Catherine E ^a  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC FILMS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PERMITTIVITY; PEROVSKITE; PLATINUM; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SEMICONDUCTING LEAD COMPOUNDS; SEMICONDUCTING SILICON; SUBSTRATES; TITANIUM; X RAY DIFFRACTION;

LEAD LANTHANUM TITANATE; PHYSICAL VAPOR DEPOSITION; TETRAMETHYLHEPTANEDIONATE;

THIN FILMS;

EID: 0029759780     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)