Calibration of non linear properties of Pb(Zr, Ti)O3 cantilever using integrated piezoresistive sensor for high speed atomic force microscopy

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 11 B, 2002, Pages 7153-7157

  Nam, Hyo Jin ^a   Kim, Young Sik ^a   Cho, Seong Moon ^a   Lee, Caroline Sunyong ^a   Bu, Jong Uk ^a   Hong, Jae Wan ^b   Khim, Zheong Gu ^b  

^a LG Electronics Inc   (South Korea)

^b Seoul National University   (South Korea)

Author keywords

Atomic force microscopy; High speed; Piezoresistor; PZT cantilever; Tip

Indexed keywords

CANTILEVER BEAMS; CREEP; HYSTERESIS; LEAD;

HIGH SPEED; PIEZORESISTOR; PZT CANTILEVER; TIP;

ATOMIC FORCE MICROSCOPY;

EID: 0346591028     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.41.7153     Document Type: Article

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