Effect of target materials on crystalline carbon nitride film preparation by ion beam sputtering

Diamond and Related Materials

Volumn 8, Issue 8-9, 1999, Pages 1724-1729

  Kuo, C T ^a   Chen, L C ^b   Chen, K H ^c   Chen, T M ^a   Lu, T R ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^c ACADEMIA SINICA   (Taiwan)

Author keywords

Carbon nitride; Ion beam growth; Mass spectrometry

Indexed keywords

CHEMICAL BONDS; COMPOSITION; DECOMPOSITION; FILM PREPARATION; GRAPHITE; ION BEAMS; MASS SPECTROMETRY; NITRIDES; SPUTTERING;

ADENINE TARGET; AZAADENINE TARGET; CARBON NITRIDE; ELECTRON BEAM ENERGY; FRAGMENTAL IONS; ION BEAM GROWTH; TARGET MATERIALS;

DIAMOND FILMS;

EID: 0346544782     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(99)00055-2     Document Type: Article

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