Relationships between gas-phase film deposition, properties and structures of thin SiO2 and BPSG films

Journal of the Electrochemical Society

Volumn 150, Issue 12, 2003, Pages

  Vassiliev, Vladislav Yu ^a  

^a INSTITUTE OF SEMICONDUCTOR PHYSICS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

BOROPHOSPHATE GLASS; BOROSILICATE GLASS; CHEMICAL BONDS; CHEMICAL VAPOR DEPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; PHYSICAL PROPERTIES; REACTION KINETICS; SILICA; SILICATES;

BOROPHOSPHOSILICATE GLASS; GAS PHASE FILM DEPOSITION; GLASS FORMING TECHNIQUE; MELT COOLING METHOD; THIN GLASS FILM; THIN VITREOUS FILM;

THIN FILMS;

EID: 0346421176     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1623770     Document Type: Article

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