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Solid State Technology

Volumn 44, Issue 3, 2001, Pages 129-130+132+134+136

Trends in void-free pre-metal CVD dielectrics

(3) Vassiliev, V Y a Sudijono, J L a Cuthbertson, A a

a CHARTERED SEMICONDUCTOR MANUFACTURING LTD (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIELECTRIC MATERIALS; SEMICONDUCTING FILMS; SEMICONDUCTING GLASS;

PRE-METAL DIELECTRIC (PMD) GAP-FILL PROCESSES;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0035278655 PISSN: 0038111X EISSN: None Source Type: Trade Journal
DOI: None Document Type: Article

Times cited : (20)

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9
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10
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14
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15
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19
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20
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- (2000)
- Vassiliev¹ Sudijono² Cuthbertson³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.