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Volumn 42, Issue 10, 2003, Pages 6384-6389

Analysis of Leakage Current in Cu/SiO2/Si/Al Capacitors under Bias-Temperature Stress

Author keywords

Bias temperature stress; C V; Capacitor; Cu; Drift; I V; Leakage current; Poole Frenkel; SiO2

Indexed keywords

CAPACITANCE; CURRENT DENSITY; CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC INSULATORS; GATES (TRANSISTOR); IONIC CONDUCTION; LEAKAGE CURRENTS; SECONDARY ION MASS SPECTROMETRY; SELF ASSEMBLY; SILICA; SILICON WAFERS; STRESS ANALYSIS;

EID: 0346329758     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.6384     Document Type: Article
Times cited : (9)

References (20)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.